Molecular Formula: C2F6
Molecular Weight: 138
|
Ingredient
|
Content |
Unit |
|
C2F6 |
≥99.999 |
%V |
|
N2 |
≤4 |
ppmv |
|
O2 |
≤1 |
ppmv |
|
CO |
≤1 |
ppmv |
|
CO2 |
≤1 |
ppmv |
|
THC (CH4) |
≤1 |
ppmv |
|
H2O |
≤1 |
ppmv |
|
Other Halocarbon |
≤3 |
ppmv |
|
Acidity (HF) |
≤0.1 |
ppmw |
Performance and Property:
Colorless stalbe gas with no smell; lightly soluble in water
Uses:
Insulation gas and plasma etching agent
Storage:
Store in cool and ventilated warehouse, and keep away from heat and fire resource
Transportation:
Meet related regulation
Packing:
In special treated clean, dry gas cylinde and the volume is 40L, 12.5L, 10L, 8L and 4L or according to requirements
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