Molecular Formula: CF4
Molecular Weight: 88
|
Item
|
Content |
Unit |
|
CF4 |
≥99.999 |
%V |
|
O2+Ar |
≤1 |
ppmv |
|
N2 |
≤4 |
ppmv |
|
CO2 |
≤1 |
ppmv |
|
CO |
≤1 |
ppmv |
|
SF6 |
≤1 |
ppmv |
|
Other Halocarbons |
≤1 |
ppmv |
|
H2O |
≤1 |
ppmv |
|
Acidity(HF) |
≤0.1 |
ppmw |
Performance and Property:
Carbon Tetrafluoride is permanent gas with no color and no smell under normal temperature and pressure
Uses:
Plasma etching gas and is widely used for electronic surface cleaning
Storage:
in cool and ventilated place and keep away from heat resourece
Transportation:
Meet related regulation
Packing:
In special treated clean, dry gas cylinde and the volume is 40L, 12.5L, 10L, 8L and 4L or according to requirements
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