|
No. |
Item |
Unit |
Specifications |
|
|
1 |
Hydrofluoric acid |
HF |
wt％ |
≥99.999 |
|
2 |
Chloride |
Cl |
ppb |
≤100 |
|
3 |
Nitrate |
NO3 |
ppb |
≤100 |
|
4 |
Phosphate |
PO4 |
ppb |
≤100 |
|
5 |
Sulfate |
SO4 |
ppb |
≤100 |
|
6 |
Silicon |
Si |
ppb |
≤100 |
|
7 |
Iron |
Fe |
ppb |
≤50 |
|
8 |
Nickel |
Ni |
ppb |
≤50 |
|
9 |
Chromium |
Cr |
ppb |
≤50 |
|
10 |
Copper |
Cu |
ppb |
≤50 |
|
11 |
Sodium |
Na |
ppb |
≤50 |
|
12 |
Calcium |
Ca |
ppb |
≤50 |
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