|
Item |
Index |
|
Fluorine (F2) content (volume fraction) % |
(5—20) |
|
Nitrogen (N2) content (volume fraction) % |
(95—80) |
|
Oxygen (O2) content (volume fraction) % |
≤0.08 |
|
carbon tetrafluoride (CF4) content (volume fraction) % |
≤0.03 |
|
Hydrogen fluoride (HF) content (volume fraction) % |
≤0.50 |
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