Gas mixture of fluorine and nitrogen

Item	Index
Fluorine (F2) content (volume fraction) %	(5—20)
Nitrogen (N2) content (volume fraction) %	(95—80)
Oxygen (O2) content (volume fraction) %	≤0.08
carbon tetrafluoride (CF4) content (volume fraction) %	≤0.03
Hydrogen fluoride (HF) content (volume fraction) %	≤0.50

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