
| 
			 Item  | 
			
			 National standard  | 
		
| 
			 Sulfur hexafluoride(SF6) (volume fraction) /10-2 ≥  | 
			
			 99.999  | 
		
| 
			 (Oxygen+argon) (O2+Ar) content (volume fraction) /10-6 ≤  | 
			
			 2.0  | 
		
| 
			 Nitrogen (N2) content (volume fraction) /10-6 ≤  | 
			
			 2.0  | 
		
| 
			 Carbon tetrafluoride(CF4) (volume fraction) /10-6 ≤  | 
			
			 1.0  | 
		
| 
			 Carbon monoxide (CO) (volume fraction) /10-6 ≤  | 
			
			 0.5  | 
		
| 
			 Carbon dioxide (CO2) (volume fraction) /10-6 ≤  | 
			
			 0.5  | 
		
| 
			 Methane (CH4) (volume fraction) /10-6 ≤  | 
			
			 0.5  | 
		
| 
			 Moisture (H2O) (volume fraction) /10-6 ≤  | 
			
			 3.0  | 
		
| 
			 Mass fraction of acidity (HF) /10-6 ≤  | 
			
			 0.1  | 
		
| 
			 Mass fraction of hydrolyzable fluoride (HF) /10-6 ≤  | 
			
			 0.8  | 
		
| 
			 Comprehensive volume fraction of impurities/10-6 ≤  | 
			
			 10  | 
		
| 
			 Particle  | 
			
			 Negotiable  | 
		
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