Fujian Shaowu Yongfei Chemical Co.,Ltd.
Fujian Shaowu Yongfei Chemical Co.,Ltd.
Fujian Shaowu Yongfei Chemical Co.,Ltd.

Fujian Shaowu Yongfei Chemical Co.,Ltd.

Electronic grade HF

EL Grade
ppb
 
Parameter
Specification(ppb)

EL grade:
1, Metallic impurities<100ppb

2, Control grain size at 1 micron.

3, Meet SEMIC1C2 standard

4, Suitable to processing of medium or large scale integrate circuit and electronic component

Assay%
≥40
Chloride
5000
H2SF6
50000
Phosphate
500
Arsenic
50
Bismuth
20
Cadmium
100
Cobalt
20
Gallium
20
Gold
50
Lead
20
Magnesium
200
K
100
Titanium
100
Sodium
200
TI
500
Sb
20
Color(APHA)
10
Sulfate
1000
SO3
2000
Aluminum
100
Barium
100
Boron
20
Chromium

20

Copper
20
Na
200
Iron
100
Lithium
20
Manganese
20
Pt
100
Silver
20
Zine
50
Sn
20
0.5um≤Particles/Millter≤/ml
27

Note: Product quality can be improved on the clients' requirements