Electronic Application Sulphur hexafluoride
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Molecular formule:SF6 Molecular weight:146.05 |
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Item(by volume) |
Company Standard |
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Sulphur hexafluoride(SF6)/10-2 |
≥99.999 |
≥99.99 |
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Air/10-6 |
≤40.0 |
≤50.0 |
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Carbon tetrafluoride(CF4)/10-6 |
≤12.0 |
≤15.0 |
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Moisture /10-6 |
≤6.0 |
≤8.0 |
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Acidityas HF)/10-6 |
≤0.7 |
≤1.0 |
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Hydrolyzable fluorides (as HF)/10-6 |
≤0.7 |
≤1.0 |
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Other impurity(CO2,C2F6,C3F8,SO2F2,S2OF2,S2OF10 )/10-6 |
≤12.0 |
≤15.0 |
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Total impurity/10-6 |
≤80 |
≤100 |
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particle |
discussible |
discussible |
Properties:
Sulphur hexafluoride is colorless, non-toxic, odorless, non-combustible and non-corrosive gas in normal conditions; good chemical stability; m.p. -50.8°C, b.p.-63.8°C , density 6.16G/l (20°C ,0.1MPa) density 2.51g/cm3 at m.p., Has good electric insulation property(and excellent arc-extinguishing property.
Use:
Electronic Grade Sulphur hexafluoride is an ideal electronic etchant, widely used in micro-electronics .
Storage: In cool, and ventilated storeshouse, keep from sunlight, heat and oil.
Transport:
Packing:
In seamless steel cylinder (40L, 12.5L, 10L, 8L, 4L) (Normally, when the pressure is 15MPa, the filling coefficient< 13.7kg/L..0)
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